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Sunday, July 26, 2020 | History

1 edition of Mechanical Microsensors found in the catalog.

Mechanical Microsensors

by Miko Elwenspoek

  • 35 Want to read
  • 34 Currently reading

Published by Springer Berlin Heidelberg, Imprint: Springer in Berlin, Heidelberg .
Written in English


About the Edition

Fabrication technologies related to those which are exploited for the fabrication of integrated circuits can be used to machine mechanical structures with minimum feature sizes in the range of micrometers. The mechanical machining of silicon based on IC-technologies is known as micromachining, and the systems made by micromachining are called MEMS (microelectromechanical systems). The present book describes how to use this technology to fabricate sensors of miniature size for mechanical quantities, such as pressure, force, flow and acceleration. The book includes a chapter with a comprehensive description of the relevant micromachining processes, and an introduction to MEMS, a field much broader than just microsensors. Most of these sensors rely on a deformation of the mechanical construction by an external load, and on a transduction mechanism to convert the deformation into a mechanical signal. The fundamental mechanics and electromechanics required for the understanding and the design of mechanical microsensors are described on a level accessible to engineers of all disciplines. Students in engineering sciences from the third year on should be able to benefit from this description. The most important mechanical sensors are described and discussed in detail with respect to fabrication issues, function and performance. Special emphasis is given to pressure sensors, force sensors, accelerometers, gyroscopes and flow sensors. Electronic interfacing, and a discussion of electronic circuits used for the sensors is also included. Finally the problem of packaging is addressed.

Edition Notes

Statementby Miko Elwenspoek, Remco Wiegerink
SeriesMicrotechnology and MEMS, 1615-8326, Microtechnology and MEMS
ContributionsWiegerink, Remco
The Physical Object
Format[electronic resource] /
Pagination1 online resource (X, 296 p.)
Number of Pages296
ID Numbers
Open LibraryOL27073903M
ISBN 103662043211
ISBN 109783662043219
OCLC/WorldCa840302440

Here¡¯s the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. BOOK REVIEW: Mechanical Microsensors: Authors: Elwenspoek, Miko; Wiegerink, Remco: Affiliation: AA((Berlin: Springer) pp Price £ ISBN 3 5 (hbk)), AB((Berlin: Springer) pp Price £ ISBN 3 5 (hbk)) Publication: Measurement Science and Technology, Vol Issue 9, pp. (). Publication Date.

Here's the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. microsensors and microactuators Wei-Chih Wang Department of Mechanical Engineering University of Washington 7/6/ 2 Class Information • Mainly mechanical sensors and actuators. 6 Schedule • Week 1. Introduction to basic principal of micro sensors and actuatorsFile Size: 1MB.

No part of this book may be reproduced or utilized in any form or by any means, MEMS: a practical guide to design, analysis, and applications / edited by Jan G. Korvink and Oliver Paul. p. em, 10 Mechanical Microsensors Franz Laerrner Introduction Mechanical Sensors Overview Micromechanical Components and Statics Microshuttles and Dynamics microsensors and MEMS devices. The book aims to make the reader familiar with these processes and technologies. Of course, most of these technologies have been derived from those currently employed.


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Mechanical Microsensors by Miko Elwenspoek Download PDF EPUB FB2

This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit­ zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to 5/5(1). "Mechanical Microsensors provides a comprehensive description of the various design techniques required for silicon micromachining of sensors.

This is a very well written book which has a pleasant balance of mathematical, physics and engineering principles, that make this book suitable for physicists, chemistry, electrical and mechanical engineers."Brand: M. Elwenspoek.

This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit­ zerland, and developed and taught by the authors.

Support by FSRM is herewith gratefully acknowledged. Mechanical Microsensors book book attempts to. The mechanical machining of silicon based on IC-technologies is known as micromachining, and the systems made by micromachining are called MEMS (microelectromechanical systems).

The present book describes how to Mechanical Microsensors book this technology to fabricate sensors of miniature size for mechanical quantities, such as pressure, force, flow and acceleration.

Microsensors, MEMs, and Smart Devices book. Read reviews from world’s largest community for readers. Microsensors and MEMS (micro-electro-mechanical syst 5/5(1).

Mechanical Microsensors by M. Elwenspoek,available at Book Depository with free delivery worldwide. Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry.

A microsystem or the so-called system-on-a-chip combines microelectronic circuitry with microsensors and microactuators.

This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle. This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by.

About this book Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry.

A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. To replace established solutions, mechanical microsensors had to prove their competitiveness with respect to cost, size, and performance.

Success stories were due to enhanced functionality, increased accuracy and performance, and higher reliability, at lower device, packaging, and mounting costs. Most of these electronic systems require the input of physical parameters. This input is provided by a ris­ing number of sensors.

Mechanical microsensors in modern cars are mainly pressure sensors, inertial sensors such as accelerometers and gyro­scopes, and sensors for steering angle and torque. TY - BOOK. T1 - Mechanical microsensors. AU - Elwenspoek, Michael Curt. AU - Wiegerink, Remco J. PY - Y1 - KW - METIS KW - IR "Mechanical Microsensors provides a comprehensive description of the various design techniques required for silicon micromachining of sensors.

This is a very well written book which has a pleasant balance of mathematical, physics and engineering principles, that make this book suitable for physicists, chemistry, electrical and mechanical engineers.". This new book Mechanical Microsensors is an example of such a special focus. The authors, Professor Miko Elwenspoek and Dr Remco Wiegerink, are heading and participating in very successful.

Here's the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you 4/5(2). Introduces mechanical microsensors (MEMS and NEMS) Details examples of the design of measurement systems Introduction to Instrumentation and Measurements is written with practicing engineers and scientists in mind, and is intended to be used in a classroom course or as a by: This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit- zerland, and developed and taught by the authors.

Support by FSRM is herewith gratefully acknowledged. This book attempts to. Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators.

Alan S. Morris, Reza Langari, in Measurement and Instrumentation (Second Edition), Microsensors are two- and three-dimensional micromachined structures that have smaller size, improved performance, better reliability, and lower production costs than many alternative forms of sensor.

Book Information Sheet Introduction to Instrumentation and Measurements, 3/e Introduces mechanical microsensors (MEMS and NEMS) Details examples of the design of measurement systems Introduction to Instrumentation and Measurements is written with practicing engineers and scientists in mind, and is intended to be used in a.

Introduces mechanical microsensors (MEMS and NEMS) Details examples of the design of measurement systems; Introduction to Instrumentation and Measurements is written with practicing engineers and scientists in mind, and is intended to be used in a classroom course or as a reference.

It is assumed that the reader has taken core EE curriculum.Books. Publishing Support. Login. Reset your password. If you have a user account, you will need to reset your password the next time you login.

You will only need to do this once. Find out more. IOPscience login / Sign Up. Please note. mechanical sensors; inductive microsensors for the detection of magnetic particles; the book explores contemporary research into the design of complete MEMS with a case study on colonies of microbots.

Scaling Issues and Design of MEMS aims to improve the reader’s basic knowledge on modelling issues of complex micro devices, and to.